Numerical and analytical study on the pull-in instability of micro-structure under electrostatic loading
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2006
ISSN: 0924-4247
DOI: 10.1016/j.sna.2005.12.045